SiNx and SiCxNy coatings were fabricated with high power impulse magnetron sputtering (HiPIMS). The coatings microstructure, growth pattern, surface morphology, composition, and bonding structure were investigated by AFM, SEM, GIXRD, TEM, EDS as well as XPS, and related to the deposition parameters target powers and substrate temperature. Cross-sections of SiCxNy coatings showed either dense and laminar, or columnar structures. These coatings varied in roughness (Ra between 0.2 and 3.8 nm) and contained up to 35 at.% C. All coatings were substoichiometric (with an N/Si ratio from 0.27 to 0.65) and contained incorporated particles (so called droplets). The SiNx coatings, in particular those deposited at the lower power on the silicon target, demonstrated a dense microstructure and low surface roughness (Ra between 0.2 and 0.3 nm). They were dominated by an (X-ray) amorphous structure and consisted mainly of Si–N bonds. The usefulness of these coatings is discussed for bearing surfaces for hip joint arthroplasty in order to prolong their life-time. The long-term aim is to obtain a coating that reduces wear and metal ion release, that is biocompatible, and with wear debris that can dissolve in vivo.
展开▼
